TECHNOLOGICAL FACILITIES

Below a schematic view of the technological area of the IMT (with a total surface of about 1800 squer meters, not scaled) is presented. In the older clean room masks and NANOBIOLAB are operating.

The clean room has a controlled level of contamination that is specified by the number of particles per meter-cubed and by maximum particle size - we are talking about pollutants such as dust, airborne microbes, aerosol particles and chemical vapours. Inside the clean room specific equipments are used,� which allow structures manufacturing (with a specific functionality, like sensors) having micro or nanometer details. For a normally operation of these equipments maintaining of the same climate condition (like temperature and humidity) is needed. Also, high purity fluids (like deionized water and nitrogen) are necessary.

Students (including Master and PhD students) from Romania and abroad were trained in the� technological activities.

Through establishment in the Scientific and Technological Park (PST) for micro and nanotechnologies (MINATECH-RO), new possibilities to offer assistance also to the small and medium companies (IMM) appears (companies involved or interested in the micro and nanotechnologies). Two technological area (including the clean room) allow to set up equipments of these companies.

nnnnnn

The technological facilities allow structures manufacturing at the micrometer or nanometer scale. In the last years IMT bought new equipments to create a modern facility which can be used also by other institute, universities or, recently, by small companies.

Contact and proximity photolithography (both sides); Resists spinning (positive and negative tone)	Reactive Ion Etching
Laser Pattern Generator (minimum feature - 0.6 microns)	Low chemical vapor deposition equipment - LPCVD
Nano-Plotter "GeneMachines OmniGrid Micro"	"GeneTAC UC4 Microarray Scanner"
SEM Vega Tescan with EBL Raith

PST MINATECH-RO was established to help Romanian IMM�s to obtain an easier access to the last generation technologies. Few companies were interested by these equipments for the moment, like: SC DDS DIAGNOSTIC SRL, TELEMEDICA SA, ROM-QUARTZ SA, SITEX 45 SRL, OPTOTECH SRL and EUROPEAN BUSSINES, INNOVATION and RESEARCH Centre.

___________________________________